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Home › Tunable Fabry Perot microelectromechanical resonator adapted for optical filters and lasers with reduced optical power-dependent tuning

Tunable Fabry Perot microelectromechanical resonator adapted for optical filters and lasers with reduced optical power-dependent tuning

US Patent 6580516 · Granted Jun 17, 2003

Estimated economic value: $17,018,000 ⓘ

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