Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Backside cannelure to provide for wafer shift detection

Backside cannelure to provide for wafer shift detection

US Patent 6576483 · Granted Jun 10, 2003

Estimated economic value: $4,723,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Battery2025
Semiconductor apparatus with transportable edge ring for substrate transport2017
Semiconductor apparatus with transportable edge ring for substrate transport2016
Method and apparatus for filtering contaminants2007
Method and apparatus for measuring gripping strength of a vacuum wand2005
Method of forming tiny silicon nitride spacer for flash EPROM by fully wet etchi2005
Wet etch system with overflow particle removing feature2004
Fluid mixing apparatus2003
Liquid supply or drain pipe equipped with a leakage detector2003
Method of etching a polysilicon layer during the stripping of the photoresist sh2002
Method for transporting and electrostatically chucking a semiconductor wafer or 2001
System for transporting and electrostatically chucking a semiconductor wafer or 2001