Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Highly efficient compact capacitance coupled plasma reactor/generator and method

Highly efficient compact capacitance coupled plasma reactor/generator and method

US Patent 6576202 · Granted Jun 10, 2003

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement s2022
Highly efficient compact capacitance coupled plasma reactor/generator and method2007
Highly efficient compact capacitance coupled plasma reactor/generator and method2006
Highly efficient compact capacitance coupled plasma reactor/generator and method2005
Method and system for vapor extraction from gases1988
Method for producing metal silicide-silicon heterostructures1985
Metal silicide-silicon heterostructures1985