Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System and method for chemical mechanical planarization

System and method for chemical mechanical planarization

US Patent 6572730 · Granted Jun 3, 2003

Estimated economic value: $24,892,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate polishing with reduced contamination2001
Substrate polishing with reduced contamination2000
Process for forming coatings on semiconductor devices1999
Spiral wound fuse bodies1984
Method of making spiral wound fuse bodies1983