Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System and method for improving thin films by gas cluster ion beam processing

System and method for improving thin films by gas cluster ion beam processing

US Patent 6537606 · Granted Mar 25, 2003

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Lighting system2017
Disposable pump and drive mechanism for dispensing a liquid food product2004
Adaptive GCIB for smoothing surfaces2004
Interface control for film deposition by gas-cluster ion-beam processing2002
Adaptive GCIB for smoothing surfaces2002
Superconducting detector assembly and apparatus utilizing same1998
Zone-melting recrystallization process1995
Silicon substrate having YSZ epitaxial barrier layer and an epitaxial supercondu1994
Superconducting detector assembly and apparatus utilizing same1994
Silicon substrate having an epitaxial superconducting layer thereon and method o1992
Method and apparatus for reducing defects in SOI structures1992
Zone-melting recrystallization process1991