Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gas distribution plate assembly for providing laminar gas flow across the surface of a substrate

Gas distribution plate assembly for providing laminar gas flow across the surface of a substrate

US Patent 6537419 · Granted Mar 25, 2003

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Cable termination method and apparatus2017
Reactor assembly and processing method2007
Wafer transport apparatus2005
Wafer transport apparatus2005
Actively-cooled distribution plate for reducing reactive gas temperature in a pl2004
Wafer transport apparatus2003
Actively-cooled distribution plate for reducing reactive gas temperature in a pl2003
Zone controlled radiant heating system utilizing focused reflector2001
Wafer temperature monitoring device utilizing flexible thermocouple2000