Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Process of fabricating an integrated circuit

Process of fabricating an integrated circuit

US Patent 6528419 · Granted Mar 4, 2003

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Silicide formation on a wafer2016
Apparatus for cleaning of circuit substrates2014
Copper diffusion barrier2014
Integration of self-aligned trenches in-between metal lines2013
MIM capacitor with enhanced capacitance2013
Control of carbon nanostructure growth in an interconnect structure2013
Capping layer formation onto a dual damescene interconnect2012
Pulsed chemical dispense system2012
Fabrication of a diffusion barrier cap on copper containing conductive elements2012
Method for forming metal interconnects in a dielectric material2012
Controlling lateral distribution of air gaps in interconnects2012
Fabrication of self-assembled nanowire-type interconnects on a semiconductor dev2012