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Home › Deposition and annealing of multicomponent ZrSnTi and HfSnTi oxide thin films using solventless liquid mixture of precursors

Deposition and annealing of multicomponent ZrSnTi and HfSnTi oxide thin films using solventless liquid mixture of precursors

US Patent 6500499 · Granted Dec 31, 2002

Estimated economic value: $50,924,000 ⓘ

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