Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Inductive coil assembly having multiple coil segments for plasma processing apparatus

Inductive coil assembly having multiple coil segments for plasma processing apparatus

US Patent 6495963 · Granted Dec 17, 2002

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma generating arrangement2021
Plasma apparatus2020
Plasma processing apparatus2019
Apparatus for chemically etching a workpiece2015
Ion beam source2015
Class E amplifier with inductive clamp2008
RF stand offs2007
Class E amplifier with inductive clamp2007
Class E amplifier with inductive clamp2005
Power supplies having protection circuits2003
Half sine wave resonant drive circuit2003
Power supplies having protection circuits2002