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Home › Microelectromechanical apparatus with tiltable bodies including variable tilt-stop engaging portions and methods of operation and fabrication therefor

Microelectromechanical apparatus with tiltable bodies including variable tilt-stop engaging portions and methods of operation and fabrication therefor

US Patent 6491404 · Granted Dec 10, 2002

Estimated economic value: $28,886,000 ⓘ

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