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Home › Method for manufacturing a ferroelectric capacitor having improved polarization characteristics and a method for manufacturing a ferroelectric memory device incorporating such capacitor

Method for manufacturing a ferroelectric capacitor having improved polarization characteristics and a method for manufacturing a ferroelectric memory device incorporating such capacitor

US Patent 6472229 · Granted Oct 29, 2002

Estimated economic value: $36,172,000 ⓘ

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