Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Low angle solvent dispense nozzle design for front-side edge bead removal in photolithography resist process

Low angle solvent dispense nozzle design for front-side edge bead removal in photolithography resist process

US Patent 6453916 · Granted Sep 24, 2002

Estimated economic value: $1,057,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Multifocal magnetron design for physical vapor deposition processing on a single2025
Security tracking device with zone-based alert suppression2024
Security tracking device with zone-based alert suppression2023
Multifocal magnetron design for physical vapor deposition processing on a single2022
Methods for depositing amorphous silicon layers or silicon oxycarbide layers via2022
Apparatus for enhanced physical vapor deposition2018
Amphiphilic block copolymers and machine dishwashing detergents containing these2016
Polymeric active ingredients which contain sulfonate groups and improve primary 2016
Mitigating heat in an integrated circuit2011
System and method for imprint lithography to facilitate dual damascene integrati2010
Mask having sidewall absorbers to enable the printing of finer features in nanop2009
Recirculation and reuse of dummy dispensed resist2009