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Home › Low-K dielectric constant CVD precursors formed of cyclic siloxanes having in-ring SI—O—C, and uses thereof

Low-K dielectric constant CVD precursors formed of cyclic siloxanes having in-ring SI—O—C, and uses thereof

US Patent 6440876 · Granted Aug 27, 2002

Estimated economic value: $723,000 ⓘ

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