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Home › Electrode and electrolyte for use in preparation of nitrogen trifluoride gas, and preparation method of nitrogen trifluoride gas by use of them

Electrode and electrolyte for use in preparation of nitrogen trifluoride gas, and preparation method of nitrogen trifluoride gas by use of them

US Patent 6440293 · Granted Aug 27, 2002

Estimated economic value: $192,000 ⓘ

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