Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of polishing at least one surface of a silicon-based part

Method of polishing at least one surface of a silicon-based part

US Patent 6428395 · Granted Aug 6, 2002

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Bimorph mirror with two piezoelectric layers separated by a central core of semi2009
Deformable system comprising a parallelepiped-shaped part and an actuator2008
Method and an element for surface polishing2006
Convertor for thermal energy into electrical energy using Stirling motor and int1985