Assignee
Inventors
- Mahari Tjahjadi (8 patents)
- Joseph M. H. Janssen (4 patents)
- George F. Fischer (2 patents)
- Ye-Gang Lin (14 patents)
- Safwat Tadros (17 patents)
- Galina D. Georgieva (3 patents)
- Scott S. Haraburda (2 patents)
US Patent 6405579 · Granted Jun 18, 2002