Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lift-off process for patterning fine metal lines

Lift-off process for patterning fine metal lines

US Patent 6372414 · Granted Apr 16, 2002

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Aromatic imide compound and method for producing same2016
Silicon-containing composition for fine pattern formation and method for fine pa2014
Silicon-based antireflective coating compositions2013
Antireflective coating compositions2012
Hardmask process for forming a reverse tone image using polysilazane2011
Composition for coating over a photoresist pattern comprising a lactam2011
Photoactive compounds2010
Process of imaging a photoresist with multiple antireflective coatings2010
Composition for coating over a photoresist pattern2010
Composition for coating over a photoresist pattern2009
Photoactive compounds2009
Photoresist composition for deep UV and process thereof2009