Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gas processing apparatus for object to be processed

Gas processing apparatus for object to be processed

US Patent 6372048 · Granted Apr 16, 2002

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plane heater2012
Shower head and film-forming device using the same2011
Gasification monitor, method for detecting mist, film forming method and film fo2011
Loading table and heat treating apparatus having the loading table2010
Substrate processing method and recording medium2009
Gasification monitor, method for detecting mist, film forming method and film fo2007
Valve and vacuum processing device with the valve2004
Gas processing apparatus for object to be processed2003
Gas processing apparatus for object to be processed2003
Gas processing apparatus baffle member, and gas processing method2002
Vacuum processing apparatus2001
Film forming apparatus and method2000