Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Pad conditioner cleaning apparatus

Pad conditioner cleaning apparatus

US Patent 6358124 · Granted Mar 19, 2002

Estimated economic value: $47,426,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods for attitude control of quadrotor unmanned aerial vehicle (UAV)2025
Power converter and coil apparatus2025
Circuit device2025
Method for CMP temperature control2025
Apparatus and method of substrate edge cleaning and substrate carrier head gap c2025
Laminated coil, coil device, and power conversion device2025
Control of processing parameters for substrate polishing with substrate precessi2025
Apparatus and method for CMP temperature control2025
Wafer edge asymmetry correction using groove in polishing pad2025
Apparatus and method of brush cleaning using periodic chemical treatments2025
Power source device2025
Roller for location-specific wafer polishing2025