Discharge electrode, RF plasma generation apparatus using the same, and power supply method

Assignee

• Mitsubishi Electric

Inventors

• Hideo Yamakoshi (22 patents)
• Kengou Yamaguchi (2 patents)
• Masayoshi Murata (21 patents)
• Yoshiaki Takeuchi (102 patents)
• Yoshikazu Nawata (2 patents)
• Koji Satake (17 patents)
• Satoshi Kokaji (1 patents)
• Shoji Morita (36 patents)
• Masatoshi Hisatome (2 patents)
• Tatsuji Horioka (4 patents)
• Hiroshi Mashima (32 patents)

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