Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Abatement of F2 using small particle fluidized bed

Abatement of F2 using small particle fluidized bed

US Patent 6352676 · Granted Mar 5, 2002

Estimated economic value: $61,258,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Process for making trisilylamine2016
Process for making trisilylamine2016
Electrolytic apparatus, system and method for the safe production of nitrogen tr2015
Process for purification of germane2006
Process for the purification of NF32006
Process for the reduction or elimination of NH3/HF byproduct in the manufacture 2004
On-line UV-Visible light halogen gas analyzer for semiconductor processing efflu2004
Self evacuating micro environment system2003
Organosilicon precursors for interlayer dielectric films with low dielectric con2003
Purification of gases2003
Removing fluorine from semiconductor processing exhaust gas2003
Removing fluorine from semiconductor processing exhaust gas2003