Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Low energy ion gun having multiple multi-aperture electrode grids with specific spacing requirements

Low energy ion gun having multiple multi-aperture electrode grids with specific spacing requirements

US Patent 6346768 · Granted Feb 12, 2002

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Electrode array2025
Ion deposition apparatus having rotatable carousel for supporting a plurality of2013
Plasma sources2013
Ion source including separate support systems for accelerator grids2013
Tandem accelerator1994
Filamentless ion source for thin film processing and surface modification1993
Ion source1988