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Home › Method for minimizing sample damage during the ablation of material using a focused ultrashort pulsed beam

Method for minimizing sample damage during the ablation of material using a focused ultrashort pulsed beam

US Patent 6333485 · Granted Dec 25, 2001

Assignee

IBM

Inventors

Richard A. Haight (75 patents)
Peter Longo (20 patents)
Daniel Peter Morris (32 patents)
Alfred Wagner (63 patents)

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