Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Compositions and methods for the selective etching of tantalum-containing films for wafer reclamation

Compositions and methods for the selective etching of tantalum-containing films for wafer reclamation

US Patent 6329299 · Granted Dec 11, 2001

Estimated economic value: $3,830,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Vehicle data communication and interaction system and construction method thereo2024
Whole vehicle in-loop test system of intelligent automobile2024
Backlight module and display device2024
Methods and apparatuses for deuterium recovery2018
Methods and apparatuses for deuterium recovery2016
Portable apparatus for separating sample and detecting target analytes2008
Rinsing processes and equipment2008
Planar micromixer2008