Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Fabrication of periodic surface structures with nanometer-scale spacings

Fabrication of periodic surface structures with nanometer-scale spacings

US Patent 6329070 · Granted Dec 11, 2001

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Polymer nanostructures, methods of making same, and uses thereof2025
Metal etchant compositions and methods of fabricating a semiconductor device usi2018
Radiation-sensitive composition and pattern-forming method2018
Block copolymers and lithographic patterning using same2017
Orthogonal processing of organic materials used in electronic and electrical dev2016
Methods of making patterned structures of materials, patterned structures of mat2016
Patterning of biomaterials using fluorinated materials and fluorinated solvents2016
Orthogonal processing of organic materials used in electronic and electrical dev2015
Orthogonal processing of organic materials used in electronic and electrical dev2014
Methods of making patterned structures of fluorine-containing polymeric material2014
Flexible substrate sensor system for environmental and infrastructure monitoring2014
Photosensitive resin composition having a high refractive index2013