Method for fabricating poly-spacers

Assignee

• Tsmc-Acer Semiconductor Manufacturing

Inventors

• Shiou-han Liaw (5 patents)
• Yau-feng Lo (2 patents)
• Po-lung Chuang (2 patents)
• Jia-Ren Chen (10 patents)
• Yen-Hung Lai (3 patents)
• Calvin Wu (12 patents)

View full patent text on Google Patents →