Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Sludge-free treatment of copper CMP wastes

Sludge-free treatment of copper CMP wastes

US Patent 6306282 · Granted Oct 23, 2001

Estimated economic value: $2,669,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus and method for rapidly adjustable liquid blending ratio2014
Apparatus and method for synchronized flow from volumetric tanks2012
Method and apparatus for providing constant liquid rates and dispensing precisel2010
Method and system for near saturation humidification of a gas flow2006
Counter balanced effluence transfer system2003
Apparatus and method for precise mixing, delivery and transfer of chemicals2001
Prevention of clogging in CVD apparatus2000
Apparatus and method for precise mixing, delivery and transfer of chemicals2000
Prevention of clogging in CVD apparatus1998
Machine for printing seller identification on lottery tickets1988