Assignee
Inventors
- Koichi Takamura (18 patents)
- Paul Velasco (4 patents)
- Peter Blanpain (7 patents)
- John Cheng (7 patents)
- Heinz Plaumann (10 patents)
- Richard Liu (6 patents)
- Wayne Millican (3 patents)
- Barry Baughman (3 patents)
US Patent 6300392 · Granted Oct 9, 2001