Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Remote-plasma-CVD method for coating or for treating large-surface substrates and apparatus for performing same

Remote-plasma-CVD method for coating or for treating large-surface substrates and apparatus for performing same

US Patent 6293222 · Granted Sep 25, 2001

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

PICVD process and device for the coating of curved substrates2000
Remote-plasma-CVD method for coating or for treating large-surface substrates an1999
Process for coating an exterior portion of a lamp1999
Plasma CVD method of producing a gradient layer1997
Optical waveguide with a substantially planar substrate and process for its prod1996
Optical inorganic waveguide with a substantially planar organic substrate1994
Apparatus for coating cap-shaped substrates1994
Process and apparatus for the ignition of CVD plasmas1994
Process for the production of a thin film optical waveguide of TiO.sub.21994
Plasma CVD process for coating a dome-shaped substrate1993
Plasma CVD process for coating a dome-shaped substrate1992
CVD coating process for producing coatings and apparatus for carrying out the pr1991