Assignee
- Japan As Represented By Director General Of The Agency Of Industrial Science And Technology
- Showa Denko
- Unknown
- Unknown
Inventors
- Hiroshi Taoda (22 patents)
- Toru Nonami (12 patents)
- Katsura Ito (13 patents)
- Hiroyuki Hagihara (15 patents)
US Patent 6291067 · Granted Sep 18, 2001