Piezoelectric thin film device

Assignee

• Mitsubishi Electric

Inventors

• Akira Yamada (290 patents)
• Chisako Maeda (6 patents)
• Toshio Umemura (6 patents)
• Fusaoki Uchikawa (41 patents)
• Koichiro Misu (16 patents)
• Shusou Wadaka (23 patents)
• Takahide Ishikawa (20 patents)

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