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Home › Simple and inexpensive method and device for measuring concentration and rate of change of a crystal etchant gas, such as HF or DF gas

Simple and inexpensive method and device for measuring concentration and rate of change of a crystal etchant gas, such as HF or DF gas

US Patent 6266996 · Granted Jul 31, 2001

Estimated economic value: $8,345,000 ⓘ

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