Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Combined enhanced shock load capability and stress isolation structure for an improved performance silicon micro-machined accelerometer

Combined enhanced shock load capability and stress isolation structure for an improved performance silicon micro-machined accelerometer

US Patent 6257060 · Granted Jul 10, 2001

Estimated economic value: $36,196,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Liquids packaging2015
Bottle2008
Tumbler2008
Tumbler2008
Container2007
MEMS teeter-totter accelerometer having reduced non-linearty2006
Attachment device2006
MEMS enhanced capacitive pick-off and electrostatic rebalance electrode placemen2005
Compensation of second-order non-linearity in sensors employing double-ended tun2004
Compensation of second-order non-linearity in sensors employing double-ended tun2004
Small size, high capacitance readout silicon based MEMS accelerometer2004
Double resonating beam force transducer with reduced longitudinal pumping2003