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Home › Plasma-enhanced vacuum vapor deposition system including systems for evaporation of a solid, producing an electric arc discharge and measuring ionization and evaporation

Plasma-enhanced vacuum vapor deposition system including systems for evaporation of a solid, producing an electric arc discharge and measuring ionization and evaporation

US Patent 6251233 · Granted Jun 26, 2001

Estimated economic value: $1,064,194,000 ⓘ

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