Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Thin film deposition apparatus

Thin film deposition apparatus

US Patent 6228439 · Granted May 8, 2001

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Film forming apparatus and film forming method2025
Active capacitive stylus, sensor controller, related system and method2025
Active pen2025
Conductive superlattice structures and methods of forming the same2025
Layered body including inorganic substrate and polyamic acid cured product2025
Trenched gate double diffused semiconductor device with channel impurity concent2025
Substrate transfer device and substrate processing system2025
Sensor board and display device2025
Vacuum transfer device, substrate processing system, and substrate processing me2025
Substrate transfer apparatus, substrate transfer method, and substrate processin2024
Laminate of inorganic substrate/polymer film layer with attached protective film2024
Linear position sensor2024