Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for fabricating a self aligned contact plug

Method for fabricating a self aligned contact plug

US Patent 6204134 · Granted Mar 20, 2001

Estimated economic value: $4,834,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Capacitor with a roughened silicide layer2004
Method of making an improved field oxide isolation structure for semiconductor i2003
Method to improve adhesion of molding compound by providing an oxygen rich film 2002
Self aligned contact plug technology2002
Borderless dual damascene contact2001
Method for making a fuse structure for improved repaired yields on semiconductor2001
Method to form self-aligned contacts with polysilicon plugs2001
Composite capacitor electrode for a DRAM cell2000
Method for making a fuse structure for improved repaired yields on semiconductor2000
Method to form a protected metal fuse2000
Fabrication of metal fuse design for redundancy technology having a guard ring2000
Shallow trench isolation technology to eliminate a kink effect2000