Method for preparing dense, epitaxial metal oxide film

Assignee

• Director-General Of Agency Of Industrial Science And Technology

Inventors

• Susumu Mizuta (9 patents)
• Iwao Yamaguchi (6 patents)
• Toshiya Kumagai (15 patents)
• Takaaki Manabe (8 patents)
• Wakichi Kondo (12 patents)
• Tadao Shimizu (26 patents)
• Tsuyoshi Terayama (1 patents)

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