Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Shape memory alloy-controlled slurry dispense system for CMP processing

Shape memory alloy-controlled slurry dispense system for CMP processing

US Patent 6179699 · Granted Jan 30, 2001

Estimated economic value: $6,431,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Automatic inflation pump bladder system2023