Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Additional buffer layer for eliminating ozone/tetraethylorthosilicate sensitivity on an arbitrary trench structure

Additional buffer layer for eliminating ozone/tetraethylorthosilicate sensitivity on an arbitrary trench structure

US Patent 6156597 · Granted Dec 5, 2000

Estimated economic value: $1,224,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for forming an oxynitride layer2004
MOS device with dual gate insulators and method of forming the same2003
Method for forming an arsenic doped dielectric layer2001
Method for reducing intensity of reflected rays encountered during process of ph2001
Method for reducing intensity of reflected rays encountered during process of ph2001
Use of multiple masks to control uniformity in coating deposition2000
Detachable sponge device for spin-coating machines1999
Method for forming insulating layers between polysilicon layers1999