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Home › Analyzing an electronic circuit formed upon a frontside surface of a semiconductor substrate by detecting radiation exiting a backside surface coated with an antireflective material

Analyzing an electronic circuit formed upon a frontside surface of a semiconductor substrate by detecting radiation exiting a backside surface coated with an antireflective material

US Patent 6107107 · Granted Aug 22, 2000

Estimated economic value: $6,781,000 ⓘ

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