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Home › Piezoelectric actuator for control and displacement sensing

Piezoelectric actuator for control and displacement sensing

US Patent 6100623 · Granted Aug 8, 2000

Estimated economic value: $34,993,000 ⓘ

Assignee

IBM

Inventors

Fu-Ying Huang (56 patents)
Wayne Isami Imaino (81 patents)
Jiann-Chang Lo (21 patents)

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