Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lateral stress relief mechanism for vacuum bellows

Lateral stress relief mechanism for vacuum bellows

US Patent 6065499 · Granted May 23, 2000

Estimated economic value: $12,643,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Transparent halo assembly for reduced particle generation2022
Hydrophobic shafts for use in process chambers2021
Hydrophobic shafts for use in process chambers2020
Transparent halo for reduced particle generation2019
Performance extraction set2019
Low particle capacitively coupled components for workpiece processing2019
Adjustable circumference electrostatic clamp2019
Gas injection system for ion beam device2018
Inductively coupled RF plasma source with magnetic confinement and Faraday shiel2018
Multiple diameter in-vacuum wafer handling2018
Gas injection system for ion beam device2018
Techniques and apparatus for manipulating an ion beam2017