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Home › Apparatus and method for polishing a flat surface using a belted polishing pad

Apparatus and method for polishing a flat surface using a belted polishing pad

US Patent 6059643 · Granted May 9, 2000

Assignee

Aplex

Inventors

Albert Hu (7 patents)
Burford J. Furman (4 patents)
Mohamed Abushaban (2 patents)

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