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Home › Aqueous surfactant solution method for stripping metal plasma etch deposited oxidized metal impregnated polymer residue layers from patterned metal layers

Aqueous surfactant solution method for stripping metal plasma etch deposited oxidized metal impregnated polymer residue layers from patterned metal layers

US Patent 6057240 · Granted May 2, 2000

Estimated economic value: $36,693,000 ⓘ

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