Method of substrate processing to form a film on multiple target objects

Assignee

• Tokyo Electron Limited
• Tokyo Electron Kyushu Limited

Inventors

• Mitsuhiro Nanbu (3 patents)
• Naruaki Iida (46 patents)
• Hideaki Gotou (3 patents)
• Masanori Tateyama (13 patents)
• Yuji Yoshimoto (17 patents)
• Tomoko Ishimoto (6 patents)
• Hidetami Yaegashi (40 patents)
• Yasunori Kawakami (29 patents)
• Takahide Fukuda (7 patents)
• Akihiro Fujimoto (75 patents)
• Takashi Takekuma (18 patents)
• Hiroyuki Matsukawa (90 patents)

View full patent text on Google Patents →