Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Thin film actuated mirror array and method for manufacturing the same

Thin film actuated mirror array and method for manufacturing the same

US Patent 6052217 · Granted Apr 18, 2000

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Chilled beam with ion generator2025
Micro piezoelectric actuator and method for fabricating same2006
Atomic force microscope and driving method therefor2004
Method for manufacturing thin film actuated mirror array in an optical projectio2001
Thin film actuated mirror array in an optical projection system1999
Thin film actuated mirror array in an optical projection system and method for m1999