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Home › Barium strontium .beta.-diketonates, processes for producing the same and processes for producing barium strontium-containing oxide dielectric films with the use of the same

Barium strontium .beta.-diketonates, processes for producing the same and processes for producing barium strontium-containing oxide dielectric films with the use of the same

US Patent 6046345 · Granted Apr 4, 2000

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