Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for forming barrier metal layer of semiconductor device

Method for forming barrier metal layer of semiconductor device

US Patent 6033983 · Granted Mar 7, 2000

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Semiconductor memory device and manufacturing method of the semiconductor memory2025
Metal interconnection structure of a semiconductor device having low resistance 2010
Metal interconnection structure of a semiconductor device having low resistance 2008
Flash memory device2007
Method for forming conductive line of semiconductor device2006
Method for forming a bit line of a semiconductor device2005
Method for forming bit line of semiconductor device2005
Method for forming metal contact of semiconductor device2005
Method for forming metal layer of semiconductor device2004
Method for forming metal interconnection of semiconductor device2000
Method for forming metal interconnection of semiconductor device2000
Method of manufacturing a semiconductor device using trench isolation1998