Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus and method for compressing high purity gas

Apparatus and method for compressing high purity gas

US Patent 5993170 · Granted Nov 30, 1999

Estimated economic value: $70,172,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Systems and methods for account processing validation2025
Web edge metrology2024
Systems and methods for account processing validation2019
Compression molded articles employing circumferential surfaces having friction-e2017
Megasonic wafer cleaning tank with reflector for improved wafer edge cleaning2007
Electro-chemical deposition cell for face-up processing of single semiconductor 2003
Fence guard2003
Edge bead removal/spin rinse dry (EBR/SRD) module2003
Inflatable compliant bladder assembly2002
Conductive biasing member for metal layering2002
Electro-chemical deposition cell for face-up processing of single semiconductor 2002
Use of tapered shadow clamp ring to provide improved physical vapor deposition s2001