Tunable-trimmable micro electro mechanical system (MEMS) capacitor

Assignee

• Rockwell Science Center

Inventors

• Mau-Chung Frank Chang (73 patents)
• Henry O. Marcy, 5th (12 patents)
• Kenneth D. Pedrotti (13 patents)
• David Richard Pehlke (142 patents)
• Charles W. Seabury (11 patents)
• Jun Yao (75 patents)
• Sangtae Park (40 patents)
• J. L. Julian Tham (8 patents)
• Deepak Mehrotra (10 patents)
• James L. Bartlett (12 patents)

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